Cluster-type OLED device
- Product Description
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This product is an independently developed “OLED vacuum deposition equipment,” and represents the sixth of the 35 critical technologies that have been identified as “bottleneck” issues. The project’s technical team has completed the R&D design and manufacturing of both G1 (1st-generation line) and G2.5 (2.5-generation line).
The project’s technical team has already resolved most of the key technical challenges (such as source furnace technology, precise alignment technology—achieving an alignment accuracy of 1.5 μm—precision vapor deposition power supply technology, in-situ film thickness measurement technology, high-vacuum transfer robotic arms, electrical control systems, and automated control software, among others).
The company can undertake the design and manufacturing of OLED G1 and G2.5 process lines for external clients.Application areas
It can be widely used in the development of OLED devices, quantum dot technology, thin-film solar cell devices, R&D and production of OLED microdisplays, verification of OLED materials, VR (Micro-OLED virtual reality), and OLED lighting.
Main technical specifications
Indicator
Parameter
Positioning accuracy
CCD precision alignment ≤ 1.5 μm; mechanical alignment ≤ 150 μm
Film thickness uniformity and repeatability
±2%
Overall technical approach
Adopt the cluster solution.
Process flow
Design - Review - Outsourcing - Assembly - Electrical Installation - Commissioning - Factory Release



Device Composition

OLED Room

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