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  • Product Description
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    This product is an independently developed “OLED vacuum deposition equipment,” and represents the sixth of the 35 critical technologies that have been identified as “bottleneck” issues. The project’s technical team has completed the R&D design and manufacturing of both G1 (1st-generation line) and G2.5 (2.5-generation line).
    The project’s technical team has already resolved most of the key technical challenges (such as source furnace technology, precise alignment technology—achieving an alignment accuracy of 1.5 μm—precision vapor deposition power supply technology, in-situ film thickness measurement technology, high-vacuum transfer robotic arms, electrical control systems, and automated control software, among others).
    The company can undertake the design and manufacturing of OLED G1 and G2.5 process lines for external clients.

    Application areas

    It can be widely used in the development of OLED devices, quantum dot technology, thin-film solar cell devices, R&D and production of OLED microdisplays, verification of OLED materials, VR (Micro-OLED virtual reality), and OLED lighting.

    Main technical specifications

    Indicator

    Parameter

    Positioning accuracy

    CCD precision alignment ≤ 1.5 μm; mechanical alignment ≤ 150 μm

    Film thickness uniformity and repeatability

    ±2%

    Overall technical approach

    Adopt the cluster solution.

    Process flow

    Design - Review - Outsourcing - Assembly - Electrical Installation - Commissioning - Factory Release

     

     

    Device Composition

    OLED Room

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